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Electron Microscopy Solutions
Electrical Failure Analysis

flexProber System for Semiconductors

Cost-effective nanoprober designed for simple operation

The flexProber is our newest SEM-based nanoprobing platform, providing electrical characterization and fault isolation capabilities for process development, device design debug, and failure analysis. flexProber’s SteadFast™ nano-manipulators, along with the LEEN™ high-resolution scanning electron microscope column and advanced control software, allow for precise, repeatable, and stable probe placement on critical level features.

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flexProber key features:

  • Platform stability: Fast, repeatable probe motion control and low drift rates for stable electrical measurements.
  • Integrated system operation: Guided work flows and software control of measurements and SEM setup for efficient operation.
  • SEM column designed for nanoprobing: High resolution at low landing energies with large field of view (FOV).

Featured Document

flexProber System Datasheet

flexProber includes eight (8) SteadFast probe positioners and a high-resolution sample stage. The sample stage can accommodate samples up to 50mm or multiple smaller samples at once. The SteadFast nano-manipulators have been designed for repeatable motion to enable users to efficiently execute sensitive electrical tests on individual transistors.

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