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Electron Microscopy Solutions
Electrical Failure Analysis

Meridian 7 System for Semiconductors

Advanced Optical Fault Isolation

The new  Thermo Scientific™ Meridian 7 system provides visible laser voltage imaging and probing and dynamic laser stimulation on sub-10nm devices. By avoiding a requirement for ultra-thin substrates, it preserves the integrity and functionality of the device under test to provide a reliable and practical production solution. It offers a 25 percent optical resolution enhancement over the previous-generation system and has a smaller spot size for better fault localization. In addition, the new Meridian 7 system offers more certainty in navigation and computer-aided design (CAD) overlay, less cross-talk and higher waveform signal-to-noise.

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Key Benefits

  • Dynamic Optical Fault Isolation for 10nm node and below
  • 7 GHz bandwidth for at-speed tests
  • High resolution visible and Infrared light
  • High-yield sample preparation to 5μm widely available
785nm SIL imaging and dynamic LSM analysis. 5um sample preparation.